Ezweni elishintsha ngokushesha elinokwakheka kwefilimu encane,izinhloso zokuphalaza zethusi ezihlanzekile kakhulubayaqhubeka nokudlala indima ebalulekile ekwenzeni kube lula ukwenziwa kwe-semiconductor okuthuthukisiwe, ubuchwepheshe bokubonisa, kanye nezixazululo zamandla avuselelekayo. Njengoba isidingo somhlaba wonke samadivayisi kagesi amancane, asheshayo, futhi asebenza kahle kakhulu aqhuba ukusungula izinto ezintsha, ukuhanjiswa kukagesi okumangalisayo kwethusi kanye nokuhambisana nezinqubo zokufakwa komusi womzimba (i-PVD) kwenza lezi zinhloso zibe yinto ebalulekile. Njengoba amanani ethusi ezinza emazingeni aphezulu ngo-2026, ukugxila embonini kushintshele ezinhlosweni zobumsulwa obuphezulu kakhulu (4N–6N) eziqinisekisa amafilimu amancane angenasici kanye nemikhiqizo yenqubo ephezulu.

Lesi sihloko sihlola izinhlobo eziyinhloko zezinhloso zokuchitha ithusi, imisebenzi yazo ethile, izimboni ezibalulekile zokusetshenziswa, kanye nezakhiwo zezinto ezenza ithusi lingaphinde lithathelwe indawo ezimweni ezibalulekile zokusebenza okuphezulu.

Izinhlobo ezahlukene zezinhloso zokuphalaza ezihlanzekile kakhulu, kufaka phakathi amapuleti angunxande ahleliwe, izimo ezenziwe ngokwezifiso, kanye nezinhlangano ezihlanganisiwe ezivame ukusetshenziswa ezinhlelweni zokuphalaza ze-magnetron.

Izinhlobo Ezivamile Zezinhloso Zokuchitha Ithusi kanye Nemisebenzi Yazo

Ama-targets e-copper sputtering akhiqizwa ngokwezidingo eziqinile, ngokuvamile anamazinga okuhlanzeka angu-99.99% (4N) kuya ku-99.9999% (6N), isakhiwo sokusanhlamvu okuhle, kanye nobuningi obukhulu (>99%). Izinhlobo eziyinhloko zifaka:

1. Ama-Planar Target(Amapuleti Ayisikwele noma Angunxande)Ukucushwa okuvame kakhulu kwezinhlelo ezijwayelekile zokuhlikihla i-magnetron. Lezi zinhloso ezisicaba zihlinzeka ngokuguguleka okufanayo kanye nokusetshenziswa okuphezulu kwezinto ezisetshenziswayo ekumbozeni indawo enkulu.
2. Ama-Targets e-Disc Ejikelezayo Ilungele ucwaningo, intuthuko, kanye nama-cathode okukhiqiza amancane. Ama-disc anikeza ukuhambisana okuhle kakhulu nama-magnetron ajikelezayo noma amile, okwenza kube nokulawula okunembile ukujiya kwefilimu.
3. Ama-Targets e-Rotary (Cylindrical noma Tubular)Yakhelwe izinhlelo ze-magnetron ezijikelezayo, lezi zivumela amazinga okusetshenziswa kwezinto eziphezulu kakhulu (kufika ku-80-90%) uma kuqhathaniswa nezinhloso ezihleliwe, okwenza zikhethwe kakhulu emigqeni yokumboza yezimboni enomthamo omkhulu.
4. Ama-Targets AhlanganisiweIhlose amapuleti asekelayo ahlanganiswe nge-indium noma nge-elastomer ukuze kuthuthukiswe ukuphathwa kokushisa kanye nokuzinza komshini ngesikhathi sokugeleza kwamandla aphezulu.

Lezi zinhlobo, ezitholakala ngezinhloso ezijwayelekile nezenziwe ngokwezifiso zokuphalaza ithusi, zenzelwe ukuzinza kwe-plasma okuhle kakhulu, ukukhiqizwa kwezinhlayiya ezincane, kanye namazinga okufakwa ahambisanayo.

Izimboni Eziyinhloko Ezisebenzisa Izinhloso Zokuchitha Ithusi Ngo-2026

Izinhloso zethusi ezihlanzekile kakhulu zibalulekile emikhakheni eminingana ekhula kakhulu:

• Ukukhiqizwa Kwe-semiconductor→ Amafilimu ethusi asebenza njengezendlalelo zembewu kanye nezendlalelo zezithiyo ezinqubweni ze-damascene zokuxhumanisa kuma-node athuthukile (sub-5nm).
• Izibonisi Zephaneli Eyisicaba→ Kusetshenziswa ku-TFT-LCD, AMOLED, kanye nezibonisi eziguquguqukayo zama-electrode esango, imigqa yomthombo/yokukhipha amanzi, kanye nezendlalelo ezibonisa ukukhanya.
• I-Photovoltaics→ Okubalulekile kuma-CIGS (i-copper indium gallium selenide) amaseli elanga amancane kanye nezakhiwo ze-perovskite tandem.
• Izibuko Zokukhanya Nezokuhlobisa→ Kusetshenziswa engilazini yezakhiwo, ezibukweni zezimoto, kanye nasezimbozweni ezivimbela ukukhanya.
• Isitoreji Sedatha kanye ne-MEMS→ Isebenza kwimidiya yokuqopha enezibuthe kanye nezinhlelo ze-micro-electro-mechanical.

Njengoba kuqhubeka ukwanda kwama-AI chips, ingqalasizinda ye-5G/6G, kanye namandla avuselelekayo, isidingo sokwethenjelwaizinhloso zokuphalaza zethusi ezihlanzekile kakhuluihlala iqinile.

Izinzuzo Eziyinhloko nokuthi Kungani Ithusi Lihlala Lingenakuthathelwa Indawo

Izinhloso zokuchitha ithusi zinikeza izinzuzo eziningana zobuchwepheshe ezingahlangani nezinye izindlela:

1. Ukuqhuba Kagesi Okuphezulu— Ithusi linikeza ukumelana okuphansi kakhulu (~1.68 µΩ·cm) phakathi kwezinsimbi ezivamile, okuvumela ukubambezeleka kwe-RC okuncishisiwe kanye nokusebenza okuphezulu kwedivayisi.
2. Ukufana Okuhle Kakhulu Kwefilimu Nokunamathela— Ama-targets acwebezelayo akhiqiza amafilimu aminyene, anesici esincane anokumbozwa kwesinyathelo okuphezulu ezicini zesilinganiso esiphezulu.
3. Ukushisa Okuphezulu Kokushisa— Kwenza kube lula ukushabalalisa ukushisa okuphumelelayo ngesikhathi sokuphalaza, okuvumela ubuningi bamandla aphezulu kanye namazinga okufakwa okusheshayo.
4. Ukuhambisana Nezinqubo Ezikhona— Ukuhlanganiswa okungenamthungo kumasethi amathuluzi e-PVD avuthiwe anezinkinga ezincane zokugoba noma zezinhlayiya uma usebenzisa ama-targets ekhwalithi ephezulu.
5. Ukwanda Okungabizi Kakhulu— Naphezu kwezindleko eziphezulu zezinto zokusetshenziswa, ithusi linikeza isilinganiso esihle kakhulu sokusebenza-kuya-entengo sokukhiqiza umthamo.

Ukungathathelwa indawo kwezicelo ezibalulekile: Nakuba i-aluminium yayisetshenziswa ngokomlando ekuxhumeni, ukwamukelwa kwethusi ngasekupheleni kwawo-1990 (inqubo ye-IBM ye-damascene) kwathuthukisa kakhulu isivinini se-chip kanye nokusebenza kahle kwamandla—izinzuzo i-aluminium engakwazi ukuziphindaphinda ngenxa yokumelana okuphezulu. Ezinye izindlela ezifana nesiliva zihlushwa izinkinga zokufuduka kwe-electro, kuyilapho i-ruthenium noma i-cobalt zigcinelwe izithiyo ezincane kakhulu kuphela. Kuma-semiconductor interconnects kanye nezicelo zemvamisa ephezulu, ukufaka esikhundleni sethusi kuzokwandisa ukusetshenziswa kwamandla, ukukhiqizwa kokushisa, kanye nosayizi wokufa—okwenza kube yinto engenakuphikwa ngaphansi kwemigwaqo yobuchwepheshe bamanje nobonakele.

I-Outlook: Ukuqinisekisa Ukunikezwa Kwempahla Emakethe Edinga Kakhulu

Njengoba izikhungo zokukhiqiza ziqhubekela phambili ekuqondeni kwezinga le-angstrom ngo-2026, ukubambisana nabaphakeli abahlinzeka ngezinhloso zethusi ezihlanzekile kakhulu, ukulawulwa okunembile kokusanhlamvu, kanye nokulandelela okugcwele kubaluleke kakhulu.

Sinezinhlobonhlobo zezinhloso zokuphalaza zethusi ezijikelezayo, ezijikelezayo, nezenziwe ngokwezifiso ngokulethwa okusheshayo kanye nokusekelwa kobuchwepheshe kochwepheshe.ikhathalogi eqondiwe yokuchitha or xhumana nochwepheshe bethuukuthola izixazululo ezenzelwe wena kuzinhlelo zokusebenza ze-semiconductor, display, noma zelanga.

Izinhloso zokuchitha zethusi ezihlanzekile kakhulu ziyaqhubeka nokunika amandla ubuchwepheshe obubumba ikusasa—ukuletha ukusebenza okungekho muntu ongakulinganisa.